Solar Cell Apparatus and Method of Fabricating the Same

ABSTRACT

According to the embodiment, there is provided a solar cell apparatus. The solar cell apparatus includes a back electrode layer on a substrate, a light absorbing layer on the back electrode layer, a buffer layer on the light absorbing layer, a front electrode layer on the buffer layer, and a connection part making contact with the front electrode layer, passing through the light absorbing layer, and making contact with the back electrode layer. The connection part includes a material different from a material constituting the front electrode layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is the continuation of U.S. application Ser. No.14/352,802, filed Apr. 18, 2014, which is the U.S. national stageapplication of International Patent Application No. PCT/KR2012/008447,filed Oct. 16, 2012, which claims priority to Korean Application No.10-2011-0106373, filed Oct. 18, 2011, the disclosures of each of whichare incorporated herein by reference in their entirety.

TECHNICAL FIELD

The embodiment relates to a solar cell apparatus and a method offabricating the same.

BACKGROUND ART

A method of fabricating a solar cell for solar light power generation isas follows. First, after preparing a substrate, a back electrode layeris formed on the substrate and patterned by a laser, thereby forming aplurality of back electrodes.

Thereafter, a light absorbing layer, a buffer layer, and a highresistance buffer layer are sequentially formed on the back electrodes.Various schemes, such as a scheme of forming a Cu(In,Ga)Se2 (CIGS)based-light absorbing layer by simultaneously or separately evaporatingCu, In, Ga, and Se and a scheme of performing a selenization processafter a metallic precursor film has been formed, have been extensivelyused in order to form the light absorbing layer. The energy band gap ofthe light absorbing layer is in the range of about 1 eV to about 1.8 eV.

Then, a buffer layer including cadmium sulfide (CdS) is formed on thelight absorbing layer through a sputtering process. The energy bandgapof the buffer layer may be in the range of about 2.2 eV to about 2.4 eV.After that, a high resistance buffer layer including zinc oxide (ZnO) isformed on the buffer layer through the sputtering process. The energybandgap of the high resistance buffer layer is in the range of about 3.1eV to about 3.3 eV.

Thereafter, a groove pattern may be formed in the light absorbing layer,the buffer layer, and the high resistance buffer layer.

After that, a transparent conductive material is laminated on the highresistance buffer layer, and is filled in the groove pattern. Therefore,a transparent electrode layer is formed on the high resistance bufferlayer, and connection wires are formed in the groove pattern. A materialconstituting the transparent electrode layer and the connection wirelessmay include aluminum doped zinc oxide (AZO). The energy bandgap of thetransparent electrode layer may be in the range of about 3.1 eV to about3.3 eV.

Then, the groove pattern is formed in the transparent electrode layer,so that a plurality of solar cells may be formed. The transparentelectrodes and the high resistance buffers correspond to the cells,respectively. The transparent electrodes and the high resistance buffersmay be provided in the form of a stripe or a matrix.

The transparent electrodes and the back electrodes are misaligned fromeach other and electrically connected with each other through theconnection wires. Accordingly, the solar cells may be electricallyconnected to each other in series.

As described above, in order to convert the solar light into electricalenergy, various solar cell apparatuses have been fabricated and used.One of the solar cell apparatuses is disclosed in Korean UnexaminedPatent Publication No. 10-2008-0088744.

DISCLOSURE Technical Problem

The embodiment provides a solar cell apparatus, capable of preventing ashort phenomenon with improved performance, and a method of fabricatingthe same.

Technical Solution

According to the embodiment, there is provided a solar cell apparatus.The solar cell apparatus includes a back electrode layer on a substrate,a light absorbing layer on the back electrode layer, a buffer layer onthe light absorbing layer, a front electrode layer on the buffer layer,and a connection part making contact with the front electrode layer,passing through the light absorbing layer, and making contact with theback electrode layer, The connection part includes a material differentfrom a material constituting the front electrode layer.

According to the embodiment, there is provided a method of fabricatingthe solar cell. The method includes forming a back electrode layer on asubstrate, forming a light absorbing layer on the back electrode layer,forming a buffer layer on the light absorbing layer, forming a frontelectrode layer on the buffer layer, forming a second through holepassing through the light absorbing layer, the buffer layer, and thefront electrode layer after forming the front electrode layer, andforming a connection part in the second through hole. The connectionpart includes a material different from a material constituting thefront electrode layer.

ADVANTAGEOUS EFFECTS

According to the present embodiment, a dead zone may be reduced by thesecond and third through holes TH2 and TH3. Accordingly, the density ofshort current can be improved, so that the photo-electric conversionefficiency can be improved.

In addition, after a thin film deposition process has been finished, thefirst to third through holes are formed at once, so that the processtime and the cost can be reduced. In addition, since the first to thirdthrough holes are formed after the thin film deposition process has beenfinished, the oxidation of the back electrode layer and the frontelectrode layer can be minimized. According, the contact resistance andthe serial resistance can be reduced, and the fill factor can beincreased.

Meanwhile, the insulating part is provided in the first through holes.Accordingly, the leakage current can be reduced, and the fill factor canbe increased.

According to the method of fabricating the solar cell apparatus of theembodiment, after the thin film deposition process has been finished,since the first to third through holes are patterned after the supportsubstrate has been completely heat-distorted, the application of theoffset value is not required.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view showing the panel of a solar cell apparatusaccording to he first embodiment,

FIG. 2 is a sectional view taken along line A-A′ of FIG. 1;

FIG. 3 is a sectional view showing the panel of a solar cell apparatusaccording to the second embodiment;

FIGS. 4 to 8 are sectional views showing the fabricating process of thepanel of the solar cell apparatus according to the first embodiment; and

FIGS. 9 to 11 are sectional views showing the fabricating process of thepanel of the solar cell apparatus according to the second embodiment.

DETAILED DESCRIPTION

In the description of the embodiments, it will be understood that, whena layer (film), a region, a pattern, or a structure, is referred to asbeing e first to third through holes are patterned after the supportsubstrate haother pad, or another pattern, it can be “directly” or“indirectly” on the other substrate, the other layer (film), the otherregion, the other pad, or the other pattern, one or more interveninglayers may also be present. Such a position of each layer has beendescribed with reference to the drawings.

The thickness and size of each layer (film), each region, each pattern,or each structure shown in the drawings may be exaggerated, omitted orschematically drawn for the purpose of convenience or clarity. Inaddition, the size of each layer (film), each region, each pattern, oreach structure does not utterly reflect an actual size.

Hereinafter, the embodiment of the disclosure will be described indetail with reference to accompanying drawings.

First, hereinafter, the solar cell apparatus according to the firstembodiment will be described in detail. FIG. 1 is a plan view showingthe panel of a solar cell apparatus according to the first embodiment,and FIG. 2 is a sectional view taken along line A-A′ of FIG. 1.

Referring to FIGS. 1 and 2, the solar cell apparatus includes a supportsubstrate 100, a back electrode layer 200, a light absorbing layer 300,a buffer layer 400, a high resistance buffer layer 500, a frontelectrode layer 600, an insulating part 700, and a plurality ofconnection parts 800.

The support substrate 100 has a plate shape and supports the backelectrode layer 200, the light absorbing layer 300, the buffer layer400, the high resistance buffer layer 500, the front electrode layer600, and the connection part 800.

The support substrate 100 may be an insulator. The support substrate 100may be a glass substrate, aplastic substrate or a metal substrate. Indetail, the support substrate 100 may be a soda lime glass substrate.The support substrate 100 may be transparent. The support substrate 100may be rigid or flexible.

The back electrode layer 200 is provided on the support substrate 100.The back electrode layer 200 is a conductive layer, For example, amaterial constituting the back electrode layer 200 may include metalsuch as molybdenum (Mo).

The back electrode layer 200 may include two or more layers In thiscase, the layers may be formed by the same metal or different metals.

The back electrode layer 200 is provided therein with first throughholes TH1. The first through holes TH1 pass through the back electrodelayer 200, the light absorbing layer 300, the buffer layer 400, and thefront electrode layer 600. The first through holes TH1 are open regionsto expose the top surface of the support substrate 100, When viewed in aplan view, first through holes TH1 may have a shape extending in onedirection.

The first through holes TH1 may have a width in the range of about 80 μmto about 200 μm.

The back electrode layer 200 is divided into a plurality of backelectrodes by the first through holes TH1. In other words, the backelectrodes are defined by the first through holes TH1.

The back electrodes are spaced apart from each other by the firstthrough holes TH1. The back electrodes are arranged in the form of astripe.

In addition, the back electrodes may be arranged in the form of amatrix. In this case, when viewed in a plan view, the first throughholes TH1 may be provided in the form of a lattice.

Meanwhile, the insulating part 700 is provided in the first throughholes TH1. In addition, a portion of the connection part 800 may beprovided in the first through holes TH1. In detail, the connection part800 may be provided on the insulating part 700. Accordingly, leakagecurrent can be reduced, and a fill factor can be increased.

A top surface 710 of the insulating part 700 is higher than a topsurface 210 of the back electrode layer. Accordingly, the back electrodelayer 200 may be insulated from the connection part 800. The insulatingpart 700 may include polymer or a ceramic material.

The light absorbing layer 300 is provided on the back electrode layer200.

The light absorbing layer 300 includes a group I-III-VI compound. Forexample, the light absorbing layer 300 may have the CIGSS(Cu(IN,Ga)(Se,S)2) crystal structure, the CISS (Cu(IN)(Se,S)2) crystalstructure or the CGSS (Cu(Ga)(Se,S)2) crystal structure.

The energy bandgap of the light absorbing layer 300 may be in the rangeof about 1 eV to about 1.8 eV.

The buffer layer 400 is provided on the light absorbing layer 300. Thebuffer layer 400 includes cadmium sulfide (CdS). The energy bandgap ofthe buffer layer 400 may be in the range of about 2.2 eV to about 2.4eV.

The high resistance buffer layer 500 is provided on the buffer layer400. The high resistance buffer layer 500 includes i-ZnO which is notdoped with impurities. The energy bandgap of the high resistance bufferlayer 500 may be in the range of about 3.1 eV to about 3.3 eV.

The light absorbing layer 300, the buffer layer 400, the high resistancebuffer layer 500, and the front electrode layer 600 are formed thereinwith second through holes TH2. The second through holes TH2 pass throughthe light absorbing layer 300, the buffer layer 400, the high resistancebuffer layer 500, and the front electrode layer 600. In addition, thesecond through holes TH2 are open regions to expose the top surface ofthe back electrode layer 200.

The second through holes TH2 are adjacent to the first through holesTH1. In other words, when viewed in a plan view, portions of the secondthrough holes TH2 are formed beside the first through holes TH1. Thesecond through holes TH2 have a shape extending in a first direction.

Each second through hole TH2 may have a width in the range of about 80μm to about 200 μm.

A plurality of light absorbing parts 310, 320, 0 l and N are defined inthe light absorbing layer 300 by second through holes TH2. In otherwords, the light absorbing layer 300 is divided into the light absorbingparts 310, 320, 0 N by the second through holes TH2.

A plurality of buffers are defined in the buffer layer 400 by the secondthrough holes TH2. In other words, the buffer layer 400 is divided intoa plurality of buffers by the second through holes TH2.

A plurality of high resistance buffers are defined in the highresistance buffer layer 500 by the second through holes TH2. In otherwords, the high resistance buffer layer 500 is divided into the highresistance buffers by the second through holes TH2.

The front electrode layer 600 is provided on the high resistance bufferlayer 500. The front electrode layer 600 is transparent, and includes aconductive layer. In addition, the front electrode layer 600 hasresistance greater than that of the back electrode layer 200.

The front electrode layer 600 includes an oxide. For example, the frontelectrode layer 600 may include an Al doped zinc oxide (AZO), or a Gadoped zinc oxide (GZO).

The front electrode layer 600 has a thickness in the range of about 0.5μm to about 1.5 μm. The front electrode layer 600 is divided into aplurality of front electrodes by the second through holes TH2. That is,the front electrodes are defined by the second through holes TH2. Thirdthrough holes TH3 are formed beside the second through holes TH2. Thethird through holes TH3 expose the top surface 210 of the back electrodelayer 200 and passes through the light absorbing layer 300.

The front electrodes have a shape corresponding to that of the backelectrodes. In other words, the front electrodes are disposed in theform of a stripe. Alternatively, the front electrodes may be disposed inthe form of a matrix.

In addition, a plurality of cells C1, C2, a and Cn are defined by thesecond through holes TH2. In more detail, the solar cell apparatusaccording to the embodiment is divided into the cells C1, C2, In and Cnby the second through holes TH2. In addition, the cells C1, C2, In andCn are connected to each other in a second direction crossing a firstdirection. In other words, current may flow in the second directionthrough the cells C1, C2, re and Cn.

The connection parts 800 are provided at the inside of the secondthrough holes TH2. In addition, a portion of the connection part 800 maybe provided in the first through holes TH1. In other words, the portionof the connection part 800 may be provided on the insulating part 700.

Each connection part 8700 extends downward from the front electrodelayer 600 and is connected to the back electrode layer 200. In detail,the connection parts 800 make contact with the front electrode layer600. The connection parts 800 pass through the light absorbing layer 300while being connected to the back electrode layer 200. For example, eachconnection part 800 extends from a front electrode of the first cell C1and is connected to a back electrode of the second cell C2.

Thus, the connection parts 800 connect adjacent cells to each other. Inmore detail, the connection parts 800 connect front electrodes and backelectrodes included in adjacent C1, C2, on and Cn to each other.

The connection part 800 includes a material different from that of thefront electrode layer 600. In detail, the connection part 800 mayinclude metal. For example, the connection part 800 may include aluminum(Al), nickel (Ni), or silver (Ag).

According to the present embodiment, a dead zone may be reduced by thesecond and third through holes TH2 and TH3. Accordingly, the density ofshort current can be improved, so that the photo-electric conversionefficiency can be improved.

In addition, as described above, the first to third through holes TH1,TH2, and TH3 are formed after performing a deposition process up to thefront electrode layer 600. In other words, after a thin film depositionprocess has been finished, the first to third through holes TH1 to TH3are formed at once, so that the process time and the cost can bereduced. In addition, since the first to third through holes TH1 to TH3are formed after the thin film deposition process has been finished, theoxidation of the back electrode layer 200 and the front electrode layer600 can be minimized. According, the contact resistance and the serialresistance can be reduced, and the fill factor can be increased. Inother words, according to the related art, the first through holes TH1are formed during the deposition process, and the stand-by time for aprocess is increased, so that the contact resistance is increased due tothe oxidation of the back electrode layer 200 and the front electrodelayer 600.

Hereinafter, a solar cell apparatus according to the second embodimentwill be described with reference to FIG. 3. For the clear and briefexplanation, the detail of the components the same as or similar tothose of the first embodiment will be omitted in order to avoidredundancy.

FIG. 3 is a sectional view showing the panel of a solar cell apparatusaccording to the second embodiment.

Referring to FIG. 3, the second through holes (reference numeral TH2 ofFIG. 2) and the third through holes (reference numeral TH3 of FIG. 2)according to the first embodiment are overlapped with each other to formsecond through holes th2. The connection part 800 may be provided in aportion of the second through holes th2.

Hereinafter, a method of fabricating the solar cell apparatus accordingto the first embodiment will be described with reference to FIGS. 4 to8. FIGS. 4 to 8 are sectional views showing the fabricating process ofthe panel of the solar cell apparatus according to the first embodiment.

First, referring to FIG. 4, the back electrode layer 200 is formed onthe support substrate 100. The back electrode layer 200 may includemolybdenum (Mo). The back electrode layer 200 may be formed with atleast two layers through processes different from each other.

A step of forming the light absorbing layer 300 on the back electrodelayer 200 is performed. The light absorbing layer 300 may be formedthrough a sputtering process or an evaporation scheme.

For example, in order to form the light absorbing layer 300, variousschemes such as a scheme of forming a Cu(In,Ga)Se2 (CIGS) based-lightabsorbing layer 300 by simultaneously or separately evaporating Cu, In,Ga, and Se and a scheme of performing a selenization process afterforming a metallic precursor film have been extensively performed.

Regarding the details of the selenization process after forming themetallic precursor layer, the metallic precursor layer is formed on theback contact electrode 200 through a sputtering process employing a Cutarget, an In target, or a Ga target.

Thereafter, the metallic precursor layer is subject to the selenizationprocess so that the Cu(In,Ga)Se2 (CIGS) based-light absorbing layer 300is formed.

In addition, the sputtering process employing the Cu target, the Intarget, and the Ga target and the selenization process may besimultaneously performed.

In addition, a CIS or a CIG light absorbing layer 300 may be formedthrough a sputtering process employing only Cu and In targets or only Cuand Ga targets and the selenization process.

Thereafter, the buffer layer 400 may be formed after depositing CdSthrough a sputtering process or a CBD (chemical bath deposition) scheme.

Thereafter, the high resistance buffer layer 500 is formed by depositingzinc oxide on the buffer layer 400 through a sputtering process.

The buffer layer 400 and the high resistance buffer layer 500 aredeposited at a low thickness. For example, the thicknesses of the bufferlayer 400 and the high resistance buffer layer 500 may be in the rangeof about 1 nm to about 80 nm.

A step of forming the front electrode layer 600 on the high resistancebuffer layer 500 is performed. The front electrode layer 600 may beformed by depositing a transparent conductive material such as Al dopedzinc oxide (AZO) on the high resistance buffer layer 500 through asputtering process.

Thereafter, referring to FIG. 5, a step of forming the first throughholes TH1 passing through the back electrode layer 200, the lightabsorbing layer 300, the buffer layer 400, and the front electrode layer600 is performed. The first through holes TH1 may be formed by amechanical device such a tip. In other words, the back electrode layer200, the light absorbing layer 300, the buffer layer 400, and the frontelectrode layer 600 may be mechanically patterned by a tip. The width ofthe tip may be in the range of about 40 μm to about 180 μm.

Subsequently, referring to FIG. 6, a step of forming the second throughholes TH2 passing through the light absorbing layer 300, the bufferlayer 400, and the front electrode layer 600 is performed after theforming the front electrode layer 600. The second through holes TH2 maybe formed adjacent to the first through holes TH1. The second throughholes TH2 may be patterned by a laser.

Thereafter, referring to FIG. 7, the third through holes TH3 may beformed beside the second through holes TH2 to expose the top surface 210for the back electrode layer 200 while passing through the lightabsorbing layer 300. The third through holes TH3 may be patterned by alaser.

Thereafter, referring to FIG. 8, the insulating part 700 may be formedin the first through holes TH1. The top surface 710 of the insulatingpart 700 may be formed higher than the top surface 210 of the backelectrode layer 200. The insulating part 700 may be formed by insertingan insulating material including polymer or a ceramic material into thefirst through holes TH1 through a screen printing scheme or a dispenser.Thereafter, a binder may be removed from the insulating material bycuring the insulating material.

Thereafter, referring to FIG. 2, the connection part 800 may be formedon the top surface of the insulating part 700 and formed in the secondthrough holes TH2. In the step of forming the connection part 800,metallic paste formed by mixing metal and an organic binder may beinserted into the second through holes TH2. The metallic paste may beinserted through a screen printing scheme or a dispenser.

Thereafter, a step of curing the metallic paste is performed. The stepof curing the metallic paste may be performed at the temperature of 250°C. or less. In addition, the step of curing the metallic paste may beperformed for 30 minutes or less. Through the step of curing themetallic paste, the binder may be removed from the metallic paste.

The dead zone can be reduced through the second and third through holesTH2 and TH3. Accordingly, the density of short current can be improved,so that the photo-electric conversion efficiency can be improved.

In addition, after the thin film deposition process has been finished,since the first to third through holes TH1 to TH3 are patterned afterthe support substrate 100 has been completely heat-distorted, theapplication of the offset value is not required.

Hereinafter, the method of fabricating the solar cell apparatusaccording to the second embodiment will be described with reference toFIGS. 9 to 11.

FIGS. 9 to 11 are sectional views showing the fabricating process of thepanel of the solar cell apparatus according to the second embodiment.

Referring to FIG. 9, a step of forming the first through holes th1passing through the back electrode layer 200, the light absorbing layer300, the buffer layer 400, and the front electrode layer 600 isperformed.

Thereafter, referring to FIG. 10, a step of forming the second throughholes th2 beside the first through holes till is performed. The secondthrough holes th2 may pass through the light absorbing layer 300, thebuffer layer 400, and the front electrode layer 600.

Then, referring to FIG. 11, the insulating part 700 may be formed in thefirst through holes th1. Subsequently, referring to FIG. 3, theconnection part 800 may be formed on the top surface 710 of theinsulating part 700 and formed in a portion of the second through holesth2.

Any reference in this specification to through holes th2.art throughholes 1 of the solar cell app., means that a particular feature,structure, or characteristic described in connection with the embodimentis included in at least one embodiment of the invention. The appearancesof such phrases in various places in the specification are notnecessarily all referring to the same embodiment. Further, when aparticular feature, structure, or characteristic is described inconnection with any embodiment, it is submitted that it is within thepurview of one skilled in the art to effect such feature, structure, orcharacteristic in connection with other ones of the embodiments.

Although embodiments have been described with reference to a number ofillustrative embodiments thereof, it should be understood that numerousother modifications and embodiments can be devised by those skilled inthe art that will fall within the spirit and scope of the principles ofthis disclosure. More particularly, various variations and modificationsare possible in the component parts and/or arrangements of the subjectcombination arrangement within the scope of the disclosure, the drawingsand the appended claims. In addition to variations and modifications inthe component parts and/or arrangements, alternative uses will also beapparent to those skilled in the art.

What is claimed is:
 1. A solar cell apparatus comprising: a backelectrode layer on a substrate; a light absorbing layer on the backelectrode layer; a buffer layer on the light absorbing layer; a frontelectrode layer on the buffer layer; a connection part making contactwith the front electrode layer, passing through the light absorbinglayer, and making contact with the back electrode layer; a first holepassing through the back electrode layer, the light absorbing layer, thebuffer layer, and the front electrode layer; and a second hole formedadjacent to the first hole while passing through the light absorbinglayer, the buffer layer, and the front electrode layer, wherein theconnection part includes a material different from a materialconstituting the front electrode layer; wherein a top surface of theconnection part is higher than a top surface of the front electrodelayer; wherein the connection part is disposed in the second hole, andspaced apart from the back electrode layer on the first hole.
 2. Thesolar cell apparatus of claim 1, wherein the connection part includesmetal.
 3. The solar cell apparatus of claim 2, wherein the connectionpart includes aluminum (Al), nickel (Ni), or silver (Ag).
 4. The solarcell apparatus of claim 1, further comprising a third hole formed besidethe second hole while passing through the light absorbing layer, thebuffer layer, and the front electrode layer.
 5. The solar cell apparatusof claim 4, wherein the second hole is overlapped with a third hole. 6.The solar cell apparatus of claim 1, a width of the first hole and awidth of the second hole are different.
 7. The solar cell apparatus ofclaim 1, further comprising an insulating part in the first hole.
 8. Thesolar cell apparatus of claim 7, wherein the insulating part includes apolymer or a ceramic material.
 9. A solar cell apparatus comprising: aback electrode layer on a substrate; a light absorbing layer on the backelectrode layer; a buffer layer on the light absorbing layer; a frontelectrode layer on the buffer layer; a connection part making contactwith the front electrode layer, passing through the light absorbinglayer, and making contact with the back electrode layer; a first holepassing through the back electrode layer, the light absorbing layer, thebuffer layer, and the front electrode layer; and a second hole formedadjacent to the first hole while passing through the light absorbinglayer, the buffer layer, and the front electrode layer wherein theconnection part includes a material different from a materialconstituting the front electrode layer; wherein a top surface of theconnection part is higher than a top surface of the front electrodelayer; wherein the connection part includes a first portion overlappingwith the first hole at a top surface of the front electrode layer; and asecond portion overlapping with the second hole at a top surface of thefront electrode layer, wherein the first portion is spaced apart fromthe back electrode layer, wherein the second portion makes contact withthe back electrode layer.
 10. The solar cell apparatus of claim 9,wherein the second portion is disposed in the second hole.
 11. The solarcell apparatus claim 9, wherein the connection part includes metal. 12.The solar cell apparatus of claim 11, wherein the connection partincludes aluminum (A nickel (Ni), or silver (Ag).
 13. The solar cellapparatus of claim 9, further comprising a third hole formed beside thesecond hole while passing through the light absorbing layer, the bufferlayer, and the front electrode layer.
 14. The solar cell apparatus ofclaim 13, wherein the second hole is overlapped with a third hole. 15.The solar cell apparatus of claim 9, a width of the first hole and awidth of the second hole are different,
 16. The solar cell apparatus ofclaim 9, further comprising an insulating part in the first hole. 17.The solar cell apparatus of claim 16, wherein the insulating partincludes a polymer or a ceramic material.